Title :
Improved bulk wave resonator coupling coefficient for wide bandwidth filters
Author :
Lakin, M. ; Belsick, J. ; McDonald, J.F. ; McCarron, K.T.
Author_Institution :
TFR Technol., Inc, Bend, OR, USA
Abstract :
Resonator coupling coefficient plays a key role in determining the bandwidth of acoustically or electrically coupled resonator filters. This paper presents a method using high mechanical impedance electrodes to increase the effective coupling coefficient for bulk acoustic wave (BAW) resonators in the solidly mounted resonator (SMR) or membrane (FBAR) configurations
Keywords :
acoustic resonator filters; bulk acoustic wave devices; electric impedance; equivalent circuits; membranes; BAW resonators; FBAR configurations; SMR configurations; acoustically coupled resonator filters; bandwidth; bulk acoustic wave resonators; bulk wave resonator coupling coefficient; electrically coupled resonator filters; high mechanical impedance electrodes; membrane configurations; solidly mounted resonator; wide bandwidth filters; Bandwidth; Coupling circuits; Electrodes; Film bulk acoustic resonators; Inductors; Resonance; Resonant frequency; Resonator filters; Temperature; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991848
