Design and modeling of polarization-stable surface-etched VCSELs

Author

Unold, H.J. ; Debernardi, P. ; Michalzik, R. ; Khan, F.K. ; Ebeling, K.J.

Author_Institution

Optoelectronics Dept., Ulm Univ., Germany

fYear

2002

fDate

2002

Firstpage

15

Lastpage

16

Abstract

We have successfully fabricated and modeled elliptically surface-etched oxide confined VCSELs for high single-mode polarization-stable operation. From our results, the two possible polarization directions seem to be determined by anisotropies in the oxidation process but can be selected by the orientation of the etched ellipse. Investigations with different mirror reflectivities and more finely varied ellipse shapes will lead to design rules for optimum performance.

Keywords

etching; laser mirrors; laser stability; laser theory; light polarisation; optical design techniques; optical fabrication; optimisation; quantum well lasers; reflectivity; semiconductor device models; surface emitting lasers; GaAs-AlGaAs; anisotropies; design rules; etched ellipse orientation; high single-mode polarization-stable operation; mirror reflectivities; modeled; optical fabrication; optimum performance; oxidation; polarization directions; surface-etched oxide confined VCSELs; Apertures; Etching; Fabrication; Laser modes; Optical polarization; Oxidation; Shape; Surface emitting lasers; Switches; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Laser Conference, 2002. IEEE 18th International

Print_ISBN

0-7803-7598-X

Type

conf

DOI

10.1109/ISLC.2002.1041096

Filename

1041096