Title :
Design and modeling of polarization-stable surface-etched VCSELs
Author :
Unold, H.J. ; Debernardi, P. ; Michalzik, R. ; Khan, F.K. ; Ebeling, K.J.
Author_Institution :
Optoelectronics Dept., Ulm Univ., Germany
Abstract :
We have successfully fabricated and modeled elliptically surface-etched oxide confined VCSELs for high single-mode polarization-stable operation. From our results, the two possible polarization directions seem to be determined by anisotropies in the oxidation process but can be selected by the orientation of the etched ellipse. Investigations with different mirror reflectivities and more finely varied ellipse shapes will lead to design rules for optimum performance.
Keywords :
etching; laser mirrors; laser stability; laser theory; light polarisation; optical design techniques; optical fabrication; optimisation; quantum well lasers; reflectivity; semiconductor device models; surface emitting lasers; GaAs-AlGaAs; anisotropies; design rules; etched ellipse orientation; high single-mode polarization-stable operation; mirror reflectivities; modeled; optical fabrication; optimum performance; oxidation; polarization directions; surface-etched oxide confined VCSELs; Apertures; Etching; Fabrication; Laser modes; Optical polarization; Oxidation; Shape; Surface emitting lasers; Switches; Vertical cavity surface emitting lasers;
Conference_Titel :
Semiconductor Laser Conference, 2002. IEEE 18th International
Print_ISBN :
0-7803-7598-X
DOI :
10.1109/ISLC.2002.1041096
