Title :
Periodic arrays of transducers built using sand blasting and ultrasound micromachining techniques for the fabrication of piezocomposite materials
Author :
Ballandras, S. ; Wilm, M. ; Gijs, M. ; Sayah, A. ; Andrey, E. ; Boy, J.-J. ; Robert, L. ; Baudouy, J.-C. ; Daniau, W. ; Laude, V.
Author_Institution :
Lab. de Phys. et de Metrologies des Oscillateurs, Univ. de Franche-Comte, Besangon, France
Abstract :
Two technological approaches devoted to the collective manufacture of piezocomposite materials are investigated. Arrays of PZT pillars are built using sand blasting and ultrasound micromachining in order to manufacture 2-2 or 1-3 connectivity piezocomposites. Different structures built with both approaches are presented. Their efficiency is discussed in conclusion.
Keywords :
composite materials; lead compounds; micromachining; piezoelectric transducers; ultrasonic machining; 1-3 connectivity; 2-2 connectivity; PZT pillars; periodic transducer arrays; piezocomposite materials; piezoelectric transducer elements; sand blasting; ultrasound micromachining techniques; Etching; Fabrication; Large-scale systems; Manufacturing processes; Micromachining; Piezoelectric transducers; Powders; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991859
