DocumentCode :
2365483
Title :
The effect of drying temperature towards electrical and structural properties of magnesium oxide
Author :
Habibah, Z. ; Ismail, L.N. ; Bakar, R.A. ; Rusop, M.
Author_Institution :
NANO- Electron. Centre (NET), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear :
2011
fDate :
25-27 April 2011
Firstpage :
276
Lastpage :
279
Abstract :
In this work, we report on the effects of drying temperature on the electrical and structural properties of MgO thin films. The MgO thin films have been prepared on glass substrates using sol-gel spin coating method. The thin films dried at four different temperatures were then subjected to electrical and structural characterizations using two point probes solar simulator (BUKOH KEIKI-EP2000), impedance/gain phase analyzer (Solartron S1 1260), atomic force microscope (AFM) and surface profiler respectively. The result showed that the resistivity of the MgO increased with the increased of the drying temperature. The uniformity of the MgO also affects the dielectric properties of the thin films. The highest relative permittivity obtained was measured to be 7.39 at drying temperature of 100°C.
Keywords :
drying; electrical resistivity; magnesium compounds; permittivity; sol-gel processing; spin coating; thin films; AFM; MgO; SiO2; atomic force microscopy; dielectric properties; drying temperature; electrical properties; electrical resistivity; glass substrates; impedance-gain phase analyzer; magnesium oxide thin films; permittivity; sol-gel spin coating; structural properties; surface profiler; temperature 100 degC; two point probes solar simulator; Films; Magnesium; Permittivity; Rough surfaces; Silicon compounds; Surface roughness; Surface treatment; Drying Temperature; MgO; Relative Permittivity; Spin Coating;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Devices, Systems and Applications (ICEDSA), 2011 International Conference on
Conference_Location :
Kuala Lumpur
ISSN :
2159-2047
Print_ISBN :
978-1-61284-388-9
Type :
conf
DOI :
10.1109/ICEDSA.2011.5959073
Filename :
5959073
Link To Document :
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