• DocumentCode
    2365483
  • Title

    The effect of drying temperature towards electrical and structural properties of magnesium oxide

  • Author

    Habibah, Z. ; Ismail, L.N. ; Bakar, R.A. ; Rusop, M.

  • Author_Institution
    NANO- Electron. Centre (NET), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
  • fYear
    2011
  • fDate
    25-27 April 2011
  • Firstpage
    276
  • Lastpage
    279
  • Abstract
    In this work, we report on the effects of drying temperature on the electrical and structural properties of MgO thin films. The MgO thin films have been prepared on glass substrates using sol-gel spin coating method. The thin films dried at four different temperatures were then subjected to electrical and structural characterizations using two point probes solar simulator (BUKOH KEIKI-EP2000), impedance/gain phase analyzer (Solartron S1 1260), atomic force microscope (AFM) and surface profiler respectively. The result showed that the resistivity of the MgO increased with the increased of the drying temperature. The uniformity of the MgO also affects the dielectric properties of the thin films. The highest relative permittivity obtained was measured to be 7.39 at drying temperature of 100°C.
  • Keywords
    drying; electrical resistivity; magnesium compounds; permittivity; sol-gel processing; spin coating; thin films; AFM; MgO; SiO2; atomic force microscopy; dielectric properties; drying temperature; electrical properties; electrical resistivity; glass substrates; impedance-gain phase analyzer; magnesium oxide thin films; permittivity; sol-gel spin coating; structural properties; surface profiler; temperature 100 degC; two point probes solar simulator; Films; Magnesium; Permittivity; Rough surfaces; Silicon compounds; Surface roughness; Surface treatment; Drying Temperature; MgO; Relative Permittivity; Spin Coating;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Devices, Systems and Applications (ICEDSA), 2011 International Conference on
  • Conference_Location
    Kuala Lumpur
  • ISSN
    2159-2047
  • Print_ISBN
    978-1-61284-388-9
  • Type

    conf

  • DOI
    10.1109/ICEDSA.2011.5959073
  • Filename
    5959073