Study of PZT coated membrane structures for micromachined ultrasonic transducers [medical imaging]

Author

Muralt, Paul ; Schmitt, Daniel ; Ledermann, Nicolas ; Baborowski, Jacek ; Weber, Peter K. ; Steichen, William ; Petitgrand, Sylvain ; Bosseboeuf, Alain ; Setter, Nava ; Gaucher, Philippe

Author_Institution

Ceramics Lab., Swiss Fed. Inst. of Technol., Lausanne, Switzerland

Volume

2

fYear

2001

fDate

2001

Firstpage

907

Abstract

Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consists of a silicon membrane coated with a (100) textured Pb(ZrTi)O ₃ (PZT) thin film deposited by sol-gel techniques. Dense and (100)-textured PZT films are obtained up to a thickness of 4 μm. Cantilever and membrane test structures were simulated by finite element analysis (FEA). Characteristic material properties have been derived comparing experimental and simulation results. The findings are used to optimize a transducer design for medical imaging in the range of 5 MHz

Keywords

biomedical transducers; biomedical ultrasonics; finite element analysis; lead compounds; piezoelectric transducers; sol-gel processing; ultrasonic transducers; 4 micron; 5 MHz; PZT; PbZrO3TiO3; cantilever test structures; coated membrane structures; finite element analysis; medical imaging; micromachined ultrasonic transducers; piezoelectric transducers; sol-gel techniques; transducer design; Analytical models; Biomembranes; Finite element methods; Medical simulation; Piezoelectric films; Semiconductor thin films; Silicon; Sputtering; Testing; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991867

Filename

991867