Title :
Integration of individual nanoscale structures into devices using dynamic nanostenciling
Author :
Egger, Stefan ; Ilie, Adelina ; Machida, Shinichi ; Nakayama, Tomonobu
Author_Institution :
International Center for Young Scientists, NIMS, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
Abstract :
We succeeded in integrating individual, pre-existing nanostructures into functional devices using ultrahigh vacuum dynamic nanostenciling. Nanostructures are first located via atomic force microscopy (AFM), while device elements are added step by step, with an achieved positional accuracy of 20 nm. Electronic transport, potentiometry, and scanning Kelvin probe can be used for control at any fabrication stage.
Keywords :
Nanoelectronics; Nanoscale devices; Nanostructures;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai, China
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585459