Dynamic Geometric Compensation for Gantry Stage using Iterative Learning Control

In this paper, iterative learning control (ILC) is used to improve the tracking accuracy of the precision motion system using a dual-axis high-grade analog optical encoder as a reference to calibrate and model the dynamic geometrical errors. This proposed approach is able to compensate for given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method resulting from such an approach. To the best of the authors´ knowledge, this is a first attempt on dynamic geometric compensation