Vibration velocity limitation of transducer using hydrothermal PZT film

Author

Kobayashi, Yutaka ; Kurosawa, Minoru Kuribayashi ; Kanda, Takefumi ; Higuchi, Toshiro

Author_Institution

Tokyo Inst. of Technol., Yokohama, Japan

Volume

2

fYear

2001

fDate

2001

Firstpage

1047

Abstract

High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear

Keywords

lead compounds; liquid phase deposition; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; vibrations; PZT; PbZrO3TiO3; deposition process; driving voltage; frequency response curves; high output power actuators; hydrothermal PZT film; hydrothermal method; longitudinal vibrator; performance; sensors; transducer vibration velocity limitation; vibration velocity; Annealing; Temperature; Transducers; Transistors; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991899

Filename

991899