• DocumentCode
    2366336
  • Title

    ESD induced capacitor shorts

  • Author

    Weaver, Elissha M. ; Yots, Christian M.

  • Author_Institution
    Gallium Arsenide Oper., Texas Instrum. Inc., Dallas, TX, USA
  • fYear
    1996
  • fDate
    10-12 Sept. 1996
  • Firstpage
    28
  • Lastpage
    31
  • Abstract
    The cause of gross capacitor shorts on Gallium Arsenide MMIC´s was traced to a resist removal operation in the plating process. This paper presents a methodology for the identification and removal of ESD sources found on production equipment used in the fabrication of GaAs devices on 100 mm substrates.
  • Keywords
    III-V semiconductors; MMIC; capacitors; electrostatic discharge; gallium arsenide; ESD; GaAs; MMIC; capacitor short; fabrication; gallium arsenide device; plating; production equipment; resist removal; Capacitors; Electrostatic discharges; Gallium compounds; MMICs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
  • Print_ISBN
    1-878303-69-4
  • Type

    conf

  • DOI
    10.1109/EOSESD.1996.865123
  • Filename
    865123
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2366336