Title :
Nanophotodetector array for near-field nano-imaging
Author :
Liu, Boyang ; Huang, Yingyan ; Kim, Ki Young ; Ho, Sen-Tiong
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL
Abstract :
A novel near-field nano-imaging device based on nanophotodetector (NPD) array is presented. Simulation shows the smallest obtainable resolution is 150 nm for 1.55 mum wavelength. Various photolithography, e-beam lithography, wafer bonding and etching back techniques have been developed to realize the thin-film based photodetector structures. A slab version NPD device has been successfully fabricated. The smallest pixel size is as small as 100 nm.
Keywords :
electron beam lithography; etching; image sensors; nanolithography; photodetectors; photolithography; thin film devices; wafer bonding; e-beam lithography; etching back techniques; nanophotodetector array; near-field nano-imaging device; photolithography; thin-film based photodetector structures; wafer bonding; Nanoelectronics;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585560
