Title :
Optical-electronic simulation of a GaAs metal-semiconductor-metal (MSM) photodetector
Author :
Körner, T.O. ; Yoder, P.D. ; Bomholt, L.H. ; Fichtner, W.
Author_Institution :
Integrated Syst. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
A complete optical-electronical simulation of a GaAs based MSM photodetector is presented. In the modeling, rigorous electromagnetic methods for the light propagation have been combined with particle-based Monte-Carlo electronic device simulation methods.
Keywords :
III-V semiconductors; Monte Carlo methods; gallium arsenide; metal-semiconductor-metal structures; photodetectors; semiconductor device models; GaAs; electromagnetic method; electronic device; light propagation; metal-semiconductor-metal photodetector; optical-electronic simulation; particle-based Monte-Carlo simulation; Detectors; Electromagnetic modeling; Electromagnetic propagation; Gallium arsenide; Geometrical optics; Gratings; Optical propagation; Optical sensors; Photodetectors; Physics;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 1996. SISPAD 96. 1996 International Conference on
Print_ISBN :
0-7803-2745-4
DOI :
10.1109/SISPAD.1996.865267
