The RF power amplifier using current source circuit

This paper presents the improved current-fed RF power source which is used as a part of the plasma generator at the power semiconductor manufacturing facility. In this application, RF source operates at several MHz, therefore, it needs a very precise switching operation. The switch malfunction caused by current distortion with load variation results in system damage. To avoid this problem, current source or Z source scheme combined with power circuit is presented. Current source and Z source circuit limits the fast current rise during switch short-through or load short. At the same time, the proposed circuit removes the demerits of the current source such as the protection at no load condition. Therefore, protection and power control of the proposed circuits are easier than of the conventional voltage fed source. Moreover, the device utilization is maximized because dead time can be minimized