Title :
25nm 64Gb MLC NAND technology and scaling challenges invited paper
Author :
Prall, Kirk ; Parat, Krishna
Author_Institution :
Micron Technol., Boise, ID, USA
Abstract :
A highly manufacturable 25nm 64Gb NAND technology has been developed. Many physical and electrical scaling challenges were overcome. Severe scaling challenges have to be overcome to continue NAND scaling.
Keywords :
NAND circuits; logic design; MLC NAND technology; electrical scaling; logic design; memory size 64 GByte; size 25 nm;
Conference_Titel :
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4424-7418-5
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2010.5703300