• DocumentCode
    2368609
  • Title

    An integrated TCAD system for VLSI reliability simulation

  • Author

    Park, Jin-Kyu ; Park, Tae-Soo ; Lee, Sang-Hoon ; Choi, Chang-Hoon ; Kim, Kyung-Ho

  • Author_Institution
    CAE, Samsung Electron. Co. Ltd., Kyungki, South Korea
  • fYear
    1996
  • fDate
    2-4 Sept. 1996
  • Firstpage
    151
  • Lastpage
    152
  • Abstract
    SANTA is a useful environment to both VLSI technology developer and circuit designers who are not familiar with complex TCAD tools. Through the ESD protection application, we find that a well selected device width and length can reduce process steps without loosing performance threshold.
  • Keywords
    VLSI; circuit CAD; electrostatic discharge; integrated circuit design; integrated circuit reliability; ESD protection; SANTA; VLSI reliability simulation; integrated TCAD system; Biological system modeling; Circuit simulation; Computational modeling; Electrostatic discharge; Fingers; Libraries; MOSFETs; Plugs; Protection; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 1996. SISPAD 96. 1996 International Conference on
  • Print_ISBN
    0-7803-2745-4
  • Type

    conf

  • DOI
    10.1109/SISPAD.1996.865316
  • Filename
    865316
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2368609