DocumentCode
2368689
Title
Graphitic interfacial layer to carbon nanotube for low electrical contact resistance
Author
Chai, Yang ; Hazeghi, Arash ; Takei, Kuniharu ; Chen, Hong-Yu ; Chan, Philip C.H. ; Javey, Ali ; Wong, H. S Philip
Author_Institution
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
fYear
2010
fDate
6-8 Dec. 2010
Abstract
Graphitic interfacial layer is used to wet the surface of carbon nanotube and dramatically lower the contact resistance of metal to metallic single-wall carbon nanotube (m-CNT). Using Ni-catalyzed graphitization of amorphous carbon (a-C), the average resistance of metal/m-CNT is reduced by 7X compared to the same contact without the graphitic layer. Small-signal conductance measurements from 77K to 300K reveal the effective contact improvement.
Keywords
carbon nanotubes; electrical contacts; graphite; interconnections; interface structure; nanotube devices; C; amorphous carbon; graphitic interfacial layer; graphitic layer; graphitization; low electrical contact resistance; metallic single wall carbon nanotube; small-signal conductance measurements; surface wetting; temperature 77 K to 300 K;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location
San Francisco, CA
ISSN
0163-1918
Print_ISBN
978-1-4424-7418-5
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2010.5703327
Filename
5703327
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