DocumentCode
2369253
Title
Fabrication of SWNT device by self-assembly technology
Author
Wang, Yanyan ; Liu, Liyue ; Liu, Hai ; Wang, Ying ; Xu, Dong ; Zhang, Yafei
Author_Institution
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai
fYear
2008
fDate
24-27 March 2008
Firstpage
941
Lastpage
944
Abstract
The single-walled carbon nanotubes (SWNTs) were randomly deposited on pre-treated silicon substrate by a self-assembling method. By this method, the SWNTs film with uniform distribution and random structure were formed and the density of SWNTs could be controlled by the concentration of the SWNTs suspension and the assembling time. Also, Cr interdigitated electrodes were patterned on the assembled SWNTs by traditional lift-off process. The results show that SWNTs films made by self-assembly can adhere firmly to the substrate.
Keywords
carbon nanotubes; nanotechnology; self-assembly; assembling time; pretreated silicon substrate; random structure; self-assembling method; single-walled carbon nanotubes device; Fabrication; Nanoelectronics; Self-assembly;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location
Shanghai
Print_ISBN
978-1-4244-1572-4
Electronic_ISBN
978-1-4244-1573-1
Type
conf
DOI
10.1109/INEC.2008.4585639
Filename
4585639
Link To Document