DocumentCode
2369914
Title
Photodetector structures for standard CMOS imaging applications
Author
Durini, Daniel ; Hosticka, Bedrich J.
Author_Institution
Univ. Duisburg- Essen/Fraunhofer IMS Duisburg, Duisburg
fYear
2007
fDate
2-5 July 2007
Firstpage
193
Lastpage
196
Abstract
In this investigation we show how a standard 0.5 mum twin-well CMOS process can be used for CMOS imaging. The process features a single-polysilicon layer, as well as three metal layers, and it is LOCOS based. We discuss various issues affecting photodetection tasks in CMOS imaging applications and present an extensive study of possible photodetector structures. Also, we propose a novel CMOS imaging pixel structure, which exceeds the standard CMOS 2-D imaging performance.
Keywords
CMOS image sensors; oxidation; photodetectors; silicon; LOCOS; photodetector; single-polysilicon layer; size 0.5 mum; twin-well CMOS imaging; CMOS process; CMOS technology; Capacitance; Epitaxial layers; P-n junctions; Photodetectors; Reflectivity; Silicon; Surface waves; Thyristors;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics Conference, 2007. PRIME 2007. Ph.D.
Conference_Location
Bordeaux
Print_ISBN
978-1-4244-1000-2
Electronic_ISBN
978-1-4244-1001-9
Type
conf
DOI
10.1109/RME.2007.4401845
Filename
4401845
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