• DocumentCode
    2369914
  • Title

    Photodetector structures for standard CMOS imaging applications

  • Author

    Durini, Daniel ; Hosticka, Bedrich J.

  • Author_Institution
    Univ. Duisburg- Essen/Fraunhofer IMS Duisburg, Duisburg
  • fYear
    2007
  • fDate
    2-5 July 2007
  • Firstpage
    193
  • Lastpage
    196
  • Abstract
    In this investigation we show how a standard 0.5 mum twin-well CMOS process can be used for CMOS imaging. The process features a single-polysilicon layer, as well as three metal layers, and it is LOCOS based. We discuss various issues affecting photodetection tasks in CMOS imaging applications and present an extensive study of possible photodetector structures. Also, we propose a novel CMOS imaging pixel structure, which exceeds the standard CMOS 2-D imaging performance.
  • Keywords
    CMOS image sensors; oxidation; photodetectors; silicon; LOCOS; photodetector; single-polysilicon layer; size 0.5 mum; twin-well CMOS imaging; CMOS process; CMOS technology; Capacitance; Epitaxial layers; P-n junctions; Photodetectors; Reflectivity; Silicon; Surface waves; Thyristors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Research in Microelectronics and Electronics Conference, 2007. PRIME 2007. Ph.D.
  • Conference_Location
    Bordeaux
  • Print_ISBN
    978-1-4244-1000-2
  • Electronic_ISBN
    978-1-4244-1001-9
  • Type

    conf

  • DOI
    10.1109/RME.2007.4401845
  • Filename
    4401845