DocumentCode
2370159
Title
Investigation of the sub-micro displacement servo system as sensor apparatus
Author
Yoo, Wonkeun ; Sekiguchi, Takasi ; Kobayashi, Naoki ; Haga, Takeshi
Author_Institution
Yokohama National University
fYear
1996
fDate
1996
Firstpage
1073
Lastpage
1076
Keywords
Actuators; Coils; Displacement measurement; Electric variables measurement; Goniometers; Instruments; Intelligent sensors; Sensor systems; Servomechanisms; Steady-state;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE '96. Proceedings of the 35th SICE Annual Conference. International Session Papers
Print_ISBN
0-7803-3751-4
Type
conf
DOI
10.1109/SICE.1996.865412
Filename
865412
Link To Document