DocumentCode :
2370159
Title :
Investigation of the sub-micro displacement servo system as sensor apparatus
Author :
Yoo, Wonkeun ; Sekiguchi, Takasi ; Kobayashi, Naoki ; Haga, Takeshi
Author_Institution :
Yokohama National University
fYear :
1996
fDate :
1996
Firstpage :
1073
Lastpage :
1076
Keywords :
Actuators; Coils; Displacement measurement; Electric variables measurement; Goniometers; Instruments; Intelligent sensors; Sensor systems; Servomechanisms; Steady-state;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SICE '96. Proceedings of the 35th SICE Annual Conference. International Session Papers
Print_ISBN :
0-7803-3751-4
Type :
conf
DOI :
10.1109/SICE.1996.865412
Filename :
865412
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2370159
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