• DocumentCode
    2371154
  • Title

    Ferroelectric thin-film characterization through use of coplanar waveguide varactors

  • Author

    Brown, Dean ; Qumsiyeh, Maher ; Subramanyam, Guru ; Patterson, Maxx ; Zhang, Clara H.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Dayton, Dayton, OH, USA
  • fYear
    2012
  • fDate
    25-27 July 2012
  • Firstpage
    149
  • Lastpage
    153
  • Abstract
    This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.
  • Keywords
    barium compounds; coplanar waveguides; ferroelectric devices; least squares approximations; strontium compounds; thin film devices; varactors; BST; Ba0.6Sr0.4TiO3; barium strontium titanate; coplanar waveguide varactors; ferroelectric thin-film characterization; least squares estimation; Ferroelectric films; electromagnetic modeling; thin film circuits; varactors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Aerospace and Electronics Conference (NAECON), 2012 IEEE National
  • Conference_Location
    Dayton, OH
  • ISSN
    0547-3578
  • Print_ISBN
    978-1-4673-2791-6
  • Type

    conf

  • DOI
    10.1109/NAECON.2012.6531046
  • Filename
    6531046
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2371154