DocumentCode
2371563
Title
The Effects of Osmium Coating and Chemical Cleaning on SEM Images of Dispenser Cathode Surface Porosity
Author
Tarter, J.O. ; Roberts, S.
Author_Institution
Semicon Associates
fYear
0
fDate
0-0 0
Firstpage
257
Lastpage
258
Abstract
Most tungsten dispenser cathodes are coated with a thin refractory metal layer to lower the work function and enhance emission. The coating must not interfere with the dispensation of barium from the tungsten matrix onto the emitting surface. Cathode manufacturers and users have long discussed the possible effects of the coating being either too thin or too thick and masking the pores in the tungsten matrix. SEM inspection is often used to evaluate the surface porosity of a dispenser cathode
Keywords
cathodes; porosity; scanning electron microscopy; sputtered coatings; surface cleaning; work function; chemical cleaning; osmium coating; scanning electron microscopy; surface porosity; tungsten dispenser cathode; work function; Barium; Cathodes; Chemicals; Cleaning; Coatings; Diodes; Inspection; Manufacturing; Radio frequency; Tungsten; Coatings; Dispenser cathode; Porosity; SEM Inspection;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2006 held Jointly with 2006 IEEE International Vacuum Electron Sources., IEEE International
Conference_Location
Monterey, CA
Print_ISBN
1-4244-0108-9
Type
conf
DOI
10.1109/IVELEC.2006.1666282
Filename
1666282
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