Title :
A fast and low actuation voltage MEMS switch for mm-wave and its integration
Author :
Akiba, Akira ; Mitarai, Shun ; Morita, Shinya ; Ikeda, Koichi ; Kurth, Steffen ; Leidich, Stefan ; Bertz, Andreas ; Nowack, Markus ; Froemel, Joerg ; Gessner, Thomas
Author_Institution :
RF Transm. & Video Syst. Dev. Div., Sony Corp., Atsugi, Japan
Abstract :
A novel mm-wave MEMS single pole single throw (SPST) switch has been developed, which is driven by 5.0 V in 10.3 μs. The insertion loss and the isolation at 60 GHz were 1.2 dB and 18 dB, respectively. A two metal layer silicon interposer technology was also developed. We designed single pole double throw (SPDT) switch module, in which two SPST switch are accommodated on the silicon interposer chip. It consists of 3 μm thick Al wires and 12 μm thick low-k benzocyclobutene (BCB) interlayer dielectrics. They enabled sufficient signal integrity for 60 GHz and higher frequencies.
Keywords :
low-k dielectric thin films; microswitches; millimetre wave devices; Al; fast actuation MEMS switch; frequency 60 GHz; low actuation voltage MEMS switch; metal layer silicon interposer technology; millimeter wave MEMS switch; silicon interposer chip; single pole single throw switch; size 12 mum; size 3 mum; thick low-k benzocyclobutene interlayer dielectrics; voltage 5 V;
Conference_Titel :
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4424-7418-5
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2010.5703487
