• DocumentCode
    2372225
  • Title

    High-Voltage Gun Micro-Arcs and Beam Energy Variations

  • Author

    Katsap, V. ; Kendall, R.A. ; Scales, V.A. ; Yahn, W.W.

  • Author_Institution
    NuFlare Technol.
  • fYear
    0
  • fDate
    0-0 0
  • Firstpage
    339
  • Lastpage
    340
  • Abstract
    In e-beam lithography tools, beam energy variation is limited to ppm levels, which is provided by sophisticated high-voltage power supplies. However, stochastic events such as micro-arcs may change beam energy beyond required limits. We report results of micro-arcs effects minimization in 50 kV triode gun
  • Keywords
    cable shielding; cables (electric); triodes; vacuum arcs; 50 kV; beam energy variations; e-beam lithography tools; high-voltage power supplies; micro-arcs effects; triode gun; Cable shielding; Capacitance; Cathodes; Guns; Lithography; Monitoring; Stochastic processes; Surface discharges; Voltage; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2006 held Jointly with 2006 IEEE International Vacuum Electron Sources., IEEE International
  • Conference_Location
    Monterey, CA
  • Print_ISBN
    1-4244-0108-9
  • Type

    conf

  • DOI
    10.1109/IVELEC.2006.1666322
  • Filename
    1666322
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2372225