Hilbert-Peano curve descriptions of layouts for contact resistance test structures in CMOS

An algorithm based upon Hilbert-Peano curves is presented for generating contact resistance test measurement layouts. The resulting contact chain path contains an excellent distribution of segment orientations, and uses all available test points within a grid. L-systems are presented as a useful way to program the layout of the contact chain expressed as strings. Using a mathematically defined space-filling curve for contact measurement allows for automatic layout generation of the test structure. Design rules may be incorporated into the curve generation algorithm, thereby making the technique portable across technologies