Title :
Single-chip surface-micromachined integrated gyroscope with 50/spl deg//hour root allan variance
Author :
Geen, J.A. ; Sherman, S.J. ; Chang, J.F. ; Lewis, S.R.
Author_Institution :
Analog Devices Inc.
Keywords :
Costs; Electrostatic actuators; FETs; Gyroscopes; Low-frequency noise; Packaging; Pulse amplifiers; Resistors; Switches; White noise;
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
DOI :
10.1109/ISSCC.2002.992288
