DocumentCode
2372664
Title
A gas detection system on a single CMOS chip compromising capactive, calorimetric, and mass-sensitive microsensors
Author
Hagleitner, C. ; Lange, D. ; Kerness, N. ; Hierlemann, A. ; Brand, O. ; Baltes, H.
Author_Institution
Physical Electronics Laboratory, ETH Zurich
Volume
2
fYear
2002
fDate
7-7 Feb. 2002
Firstpage
350
Lastpage
543
Keywords
Capacitive sensors; Capacitors; Finite impulse response filter; Gas detectors; Power amplifiers; Power measurement; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-7335-9
Type
conf
DOI
10.1109/ISSCC.2002.992290
Filename
992290
Link To Document