DocumentCode
2372697
Title
Molecular Dynamics Investigation of the Surface Coating Processes
Author
Utkin, Andrey V. ; Golovnev, Igor F. ; Fomin, Vasily M.
Author_Institution
Phys. Of Fast Process Lab., Khristianovich Inst. of Theor. & Appl. Mech., Novosibirsk, Russia
fYear
2011
fDate
20-23 June 2011
Firstpage
250
Lastpage
253
Abstract
In the present study molecular dynamics simulations were performed for collisions of nanoclusters with the substrate for determining the mechanism of formation of bound states depending on the cluster size, impact velocity and angle of incidence.
Keywords
coating techniques; molecular dynamics method; surface treatment; impact velocity; molecular dynamics simulations; nanoclusters; surface coating processes; three-dimensional molecular dynamics; Atomic layer deposition; Coatings; Kinetic theory; Substrates; Surface treatment; Temperature dependence; molecular dynamics; nanoclusters; parallel computing;
fLanguage
English
Publisher
ieee
Conference_Titel
Computational Science and Its Applications (ICCSA), 2011 International Conference on
Conference_Location
Santander
Print_ISBN
978-1-4577-0142-9
Type
conf
DOI
10.1109/ICCSA.2011.51
Filename
5959631
Link To Document