Title :
Experimental Investigation of 95GHz Folded Waveguide Backward Wave Oscillator Fabricated by Two-Step LIGA
Author :
Shin, Y.M. ; So, J.K. ; Jang, K.H. ; Won, J.H. ; Srivastava, A. ; Han, S.T. ; Park, G.S. ; Kim, J.H. ; Chang, S.S. ; Sharma, R.K. ; Joshi, S.N.
Author_Institution :
Sch. of Phys., Seoul Nat. Univ.
Abstract :
Most recently, 95GHz three-dimensional folded waveguide structure including the electron beam-tunnel is completely microfabricated by two-step deep-etch X-ray lithography (X-ray LIGA). The precision and positional tolerance of the circuit elements are respectively 2mum and 2-3 mum. We experimentally measured its dispersive and attenuative properties through scattering matrices and compare them to analytical and numerical calculations. The MAGIC3D simulation numerically predicted the folded waveguide BWO (FWBWO) has start-oscillation current of 30mA and produces output power of 5 Watts at the beam condition of about 12kV and 50mA. Currently, we prepare experiment of the FWBWO equipped with the electron gun
Keywords :
LIGA; S-matrix theory; backward wave oscillators; electron guns; millimetre wave tubes; 2 to 3 micron; 30 mA; 3D folded waveguide structure; 5 W; 95 GHz; FWBWO; MAGIC3D simulation; X-ray LIGA; attenuative properties; deep-etch X-ray lithography; dispersive properties; electron beam-tunnel; electron gun; folded waveguide BWO; folded waveguide backward wave oscillator; scattering matrices; two-step LIGA; Attenuation measurement; Circuits; Dispersion; Electron beams; Numerical simulation; Oscillators; Predictive models; Transmission line matrix methods; X-ray lithography; X-ray scattering; FWBWO; LIGA; beam-tunnel; folded waveguide; two-step;
Conference_Titel :
Vacuum Electronics Conference, 2006 held Jointly with 2006 IEEE International Vacuum Electron Sources., IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
1-4244-0108-9
DOI :
10.1109/IVELEC.2006.1666361
