DocumentCode
2373329
Title
Research of surface modification on frequency properties of microresonators
Author
Gaidukov, Gennadiy ; Pagin, Pavel
Author_Institution
Moscow Inst. of Electron. Eng. (Tech. Univ.), Moscow
fYear
2008
fDate
1-5 July 2008
Firstpage
91
Lastpage
93
Abstract
In the article the influence of adsorbed layer on elastic constants and surface stress are considered in MEMS and NEMS. The calculated results are shown on example of silicon resonator. Comparison between theoretical and calculated results is shown.
Keywords
adsorbed layers; elastic constants; elemental semiconductors; micromechanical resonators; silicon; MEMS; NEMS; Si; adsorbed layer silicon resonator; elastic constants; frequency properties; microresonators; surface modification; surface stress; Equations; Joining processes; Microcavities; Micromechanical devices; Nanoelectromechanical systems; Resonance; Resonant frequency; Silicon; Stress; Structural beams; MEMS; frequency properties; resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location
Novosibirsk
ISSN
1815-3712
Print_ISBN
978-5-7782-0893-3
Type
conf
DOI
10.1109/SIBEDM.2008.4585856
Filename
4585856
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