High Voltage Compatible Micromachined Vacuum Electronic Devices with Carbon Nanotube Cold Cathodes

Author

Bower, Christopher A. ; Gilchrist, Kristin H. ; Broderick, Scott ; Piascik, Jeffrey R. ; Stoner, Brian R. ; Parker, Charles B. ; Natarajan, Srividya ; Wolter, Scott D. ; Glass, Jeffrey T.

Author_Institution

RTI Int.

fYear

0

fDate

0-0 0

Firstpage

471

Lastpage

472

Abstract

Previously, Bower et al. demonstrated a microfabricaied vacuum microtriode with an integrated carbon nanotube field emission cathode. One of the main limitations of the microtriode was the inadequate device insulation which suffered from leakage currents and electrical breakdown at fewer than 200 Volts. Here, we report similar micromachined vacuum electronic devices fabricated to withstand voltages in excess of 1000 Volts. The DC electrical characteristics of a microtriode were obtained at grid and anode voltage levels significantly higher than previously reported. The field emission performance of the MPECVD grown carbon nanotube cold cathode is described. Implications for future on-chip microfabricated vacuum electronic devices were discussed

Keywords

carbon nanotubes; cold-cathode tubes; micromachining; nanotube devices; triodes; vacuum microelectronics; MPECVD; carbon nanotube cold cathode; field emission performance; high voltage compatibility; microfabricaied vacuum microtriode; micromachined vacuum electronic devices; on-chip microfabricated vacuum electronic; vacuum microelectronics; Anodes; Carbon nanotubes; Cathodes; Dielectrics and electrical insulation; Electrodes; Electrons; Micromechanical devices; Microwave devices; Silicon; Voltage; carbon nanotubes; field emission; vacuum microelectronics;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics Conference, 2006 held Jointly with 2006 IEEE International Vacuum Electron Sources., IEEE International

Conference_Location

Monterey, CA

Print_ISBN

1-4244-0108-9

Type

conf

DOI

10.1109/IVELEC.2006.1666387

Filename

1666387