Non-Destructive Broad-Band Characterization Method of Thin Ferroelectric Layers at Microwave Frequencies

Author

Blasi, Serge De ; Quéfféléc, Patrick

Author_Institution

Lab.-STICC, Telecom Bretagne, Brest

fYear

2008

fDate

27-31 Oct. 2008

Firstpage

793

Lastpage

796

Abstract

A non-destructive broad-band method using a rectangular waveguide cell to characterize ferroelectric materials is proposed in this article. The cell scattering parameters (S-parameters) are calculated from an electromagnetic analysis based on the application of the mode matching technique. The sensitivity of this method proved to be sufficient to allow characterization of submicronic ferroelectric layers.

Keywords

S-parameters; electromagnetic wave scattering; ferroelectric materials; mode matching; rectangular waveguides; waveguide theory; S-parameters; cell scattering parameters; electromagnetic analysis; microwave frequencies; mode matching technique; nondestructive broadband characterization method; rectangular waveguide cell; submicronic ferroelectric layers; thin ferroelectric layers; Coplanar transmission lines; Dielectric losses; Dielectric measurements; Dielectric substrates; Ferroelectric materials; Metallization; Microwave frequencies; Permittivity measurement; Propagation losses; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2008. EuMC 2008. 38th European

Conference_Location

Amsterdam

Print_ISBN

978-2-87487-006-4

Type

conf

DOI

10.1109/EUMC.2008.4751572

Filename

4751572