Controlled dissolution applied to berlinite and quartz materials

Author

Deleuze, M. ; Cambon, O. ; Goiffon, A. ; Ibanez, A. ; Philippot, E.

Author_Institution

Lab. de Physiochimie des Materiaux Solides, CNRS, Montpellier, France

fYear

1993

fDate

2-4 Jun 1993

Firstpage

381

Lastpage

389

Abstract

Conditions of good controlled dissolution of berlinite and quartz have been found for two different plate orientations: AT and SC cuts. Chemical lapping of berlinite AT-cuts has been developed in acid media, and that of AT- and SC-cuts has been developed in basic solvents. Conditions have been specified for both materials which result in a good surface state and a thickness defined by the required frequency. Piezoelectric characteristics of resonators made from controlled dissolution and from ionic beam etching are compared

Keywords

aluminium compounds; crystal growth from solution; crystal resonators; dissolving; piezoelectric materials; quartz; sputter etching; surface topography; AT-cut crystal; AlPO₄; SC-cut crystal; SiO₂; berlinite; chemical lapping; controlled dissolution; ionic beam etching; piezoelectric resonators; quartz; surface state; Chemicals; Crystallization; Etching; Ion beams; Lapping; Resonant frequency; Rough surfaces; Surface roughness; Surface texture; Thermodynamics;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International

Conference_Location

Salt Lake City, UT

Print_ISBN

0-7803-0905-7

Type

conf

DOI

10.1109/FREQ.1993.367420

Filename

367420