Title :
A frequency stabilized semiconductor laser microsource based on MOEMS technology
Author :
Argue, P. ; Bonnefont, S. ; Lozes-Dupuy, F. ; Della, O. ; de Labachelerie, M. ; Chappaz, C.
Author_Institution :
LAAS, CNRS, Toulouse, France
fDate :
28 Sept.-2 Oct. 2003
Abstract :
A MOEMS solution is presented for the fabrication of an innovating laser microsource based on a surface-emitting DBR laser diode associated with a tunable micromirror. Theoretical study, fabrication process and characterization are described. It is shown that the MOEMS device leads to a clear stabilizing effect of the laser diode single mode properties.
Keywords :
distributed Bragg reflector lasers; micro-optics; surface emitting lasers; MOEMS technology; frequency stabilized semiconductor laser microsource; innovating laser microsource; stabilizing effect; surface-emitting DBR laser diode; Diode lasers; Distributed Bragg reflectors; Frequency; Laser modes; Laser stability; Laser theory; Optical device fabrication; Semiconductor lasers; Surface emitting lasers; Tunable circuits and devices;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251336
