Title :
1998 International Semiconductor Conference. CAS´98 Proceedings (Cat. No.98TH8351)
Abstract :
The following topics were dealt with: sensors and microsystems; semiconductor physics; silicon devices; integrated circuits; material processing and characterization; reliability; electron devices; silicon carbide; semiconductor technology; modeling; optoelectronics; microwaves; applications
Keywords :
micromechanical devices; microwave devices; monolithic integrated circuits; optoelectronic devices; reliability; semiconductor device models; semiconductor devices; semiconductor process modelling; semiconductor technology; semiconductors; sensors; applications; electron devices; integrated circuits; material characterization; material processing; microsystems; microwaves; modeling; optoelectronics; reliability; semiconductor physics; semiconductor technology; sensors; silicon carbide; silicon devices;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia, Romania
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.732248
