Membrane Supported Transmission Lines and Filters

Author

Wang, Yi ; Prest, Martin J. ; Lancaster, Michael J.

Author_Institution

Sch. of Eng., Univ. of Birmingham, Birmingham

fYear

2008

fDate

27-31 Oct. 2008

Firstpage

1133

Lastpage

1136

Abstract

The membrane supported device is attractive because of its capability to realize low loss components at millimeter and sub-millimeter wave frequencies on traditional semiconductor substrates. This is done by eliminating a large portion of the dielectric substrate and suspending the circuit area. This paper presents results of membrane supported transmission lines and Ka-band filters on silicon substrates. The fabrication is enabled by bulk micromachining of the silicon. Two types of filters are designed, one based on a coplanar-waveguide, and the other on microstrip resonators.

Keywords

coplanar transmission lines; coplanar waveguides; membranes; micromachining; microstrip filters; microstrip resonators; millimetre wave filters; submillimetre wave filters; Ka-band filters; Si; coplanar waveguide; membrane supported device; micromachining; microstrip resonators; millimeter frequencies; silicon substrates; sub-millimeter wave frequencies; transmission lines; Biomembranes; Coplanar transmission lines; Dielectric substrates; Distributed parameter circuits; Fabrication; Frequency; Millimeter wave devices; Resonator filters; Silicon; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2008. EuMC 2008. 38th European

Conference_Location

Amsterdam

Print_ISBN

978-2-87487-006-4

Type

conf

DOI

10.1109/EUMC.2008.4751658

Filename

4751658