Title :
CAD/CAE in Semiconductor Fabrication: An Integrated Approach
Author :
Arora, Vijay K. ; Samudra, Ganesh
Author_Institution :
National University of Singapore
Keywords :
Computer aided engineering; Fabrication;
Conference_Titel :
Frontiers in Education, 1992. Proceedings. Twenty-Second Annual conference
Print_ISBN :
0-7803-0832-8
DOI :
10.1109/FIE.1992.683496
