Title :
Analitical modeling for design of heated microbridge applied in catalytic gas microsensors
Author :
Cobianu, O.M. ; Cobianu, C. ; Moldovan, C.
Author_Institution :
Dept. of Electron. & Telecommun. Sci., Institutul Politehnic, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
This paper is concerned with the analitical investigation of the heat transfer mechanisms through the heated microbridge. The results are used for design a heated microbridge applied in catalytic gas microsensors.
Keywords :
catalysis; gas sensors; heat transfer; microsensors; catalytic gas microsensors; heat transfer mechanisms; heated microbridge; Analytical models; Bridges; Equations; Heat transfer; Mathematical model; Microsensors; Resistance heating; Temperature; Thermal conductivity; Thermal resistance;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251380
