Building of silicon mechanical sensors by bulk micromachining and anodic bonding

This paper deals with some industrial aspects of microsensor technology and the approach taken by SensoNor in building silicon mechanical sensors. The paper gives a review of the two major technological tools employed in the fabrication of silicon mechanical sensors, micromachining and anodic bonding. To demonstrate the strength of the proven technology, several examples of feasible, low cost, highly reliable sensors are presented