Integrated Antennas for Wireless Interconnections on Silicon up to 110 GHz

Wireless interconnect is an alternative to high integration in silicon where it will be difficult to have all interconnections in the back end of line (BEOL) due to size reduction of active components. The feasibility of such interconnect was previously demonstrated by designing and characterising integrated antennas. The targeted frequency range was about 30 GHz. In the present paper, we have analysed in term of propagation mode and by measurement the possibility of increasing the operating frequency up to 110 GHz. It is demonstrated that the transmission around 30 GHz is possible but another frequency range around 95 GHz can also be used.