Title :
LaTiOxNy Thin Films, Measurement and Application to Microwave Device
Author :
Kassem, Hussein ; Ziani, Ahmed ; Vigneras, Valerie ; Lunet, G. ; Le Paven-Thivet, C. ; Le Gendre, L. ; Tessier, Franck
Author_Institution :
IMS-Bordeaux Lab., Univ. of Bordeaux, Bordeaux
Abstract :
This paper reports about three issues: a non-destructive method for dielectric measurement of materials; the first microwave dielectric measurement of a new birth dielectric LaTiOxNy material, and a topology for X-band phase shifter based on tuneable ferroelectric thin films interdigital capacitors.
Keywords :
barium compounds; dielectric materials; dielectric measurement; ferroelectric capacitors; ferroelectric thin films; lanthanum compounds; microwave materials; microwave measurement; microwave phase shifters; sulphur compounds; thin film capacitors; Ba0.6S0.4TiO3; LaTiOxNy; X-band phase shifter; dielectric material; interdigital capacitors; microwave device; microwave dielectric measurement; nondestructive method; tuneable ferroelectric thin films; Dielectric materials; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Magnetic materials; Microwave theory and techniques; Permittivity; Thin film devices; Transmission line measurements; Tunable circuits and devices;
Conference_Titel :
Microwave Conference, 2008. EuMC 2008. 38th European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-006-4
DOI :
10.1109/EUMC.2008.4751717
