DocumentCode :
2377002
Title :
Thin film metallization of three-dimensional substrates
Author :
Davis, J. Lynn ; Arledge, J. Kevin
Author_Institution :
Land Mobile Products Sect., Motorola Inc., Ft. Lauderdale, FL, USA
fYear :
1994
fDate :
1-4 May 1994
Firstpage :
359
Lastpage :
361
Abstract :
Metallization of three-dimensional (3D) molded polymer substrates by sputtering technology is an exciting alternative to traditional electroless plating processes. The technology offers the ability to rapidly coat the 3D circuit base without the use of precious metal catalysts or plating baths that may be environmentally harmful. Consequently, sputter coating of 3D circuits offers the advantages of high through-put and flexible manufacturing while minimizing disposable wastes. This paper focuses on the critical issues affecting the performance of sputtered thin film on 3D polymer substrates
Keywords :
adhesion; integrated circuit technology; metallisation; multichip modules; polymers; sputter deposition; sputtered coatings; substrates; 3D circuits; 3D molded polymer substrates; sputter coating; sputtered thin film; sputtering technology; thin film metallization; three-dimensional substrates; Adhesives; Circuits; Copper; Etching; Manufacturing; Metallization; Polymer films; Sputtering; Substrates; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 1994. Proceedings., 44th
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-0914-6
Type :
conf
DOI :
10.1109/ECTC.1994.367564
Filename :
367564
Link To Document :
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