DocumentCode
2377002
Title
Thin film metallization of three-dimensional substrates
Author
Davis, J. Lynn ; Arledge, J. Kevin
Author_Institution
Land Mobile Products Sect., Motorola Inc., Ft. Lauderdale, FL, USA
fYear
1994
fDate
1-4 May 1994
Firstpage
359
Lastpage
361
Abstract
Metallization of three-dimensional (3D) molded polymer substrates by sputtering technology is an exciting alternative to traditional electroless plating processes. The technology offers the ability to rapidly coat the 3D circuit base without the use of precious metal catalysts or plating baths that may be environmentally harmful. Consequently, sputter coating of 3D circuits offers the advantages of high through-put and flexible manufacturing while minimizing disposable wastes. This paper focuses on the critical issues affecting the performance of sputtered thin film on 3D polymer substrates
Keywords
adhesion; integrated circuit technology; metallisation; multichip modules; polymers; sputter deposition; sputtered coatings; substrates; 3D circuits; 3D molded polymer substrates; sputter coating; sputtered thin film; sputtering technology; thin film metallization; three-dimensional substrates; Adhesives; Circuits; Copper; Etching; Manufacturing; Metallization; Polymer films; Sputtering; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1994. Proceedings., 44th
Conference_Location
Washington, DC
Print_ISBN
0-7803-0914-6
Type
conf
DOI
10.1109/ECTC.1994.367564
Filename
367564
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