• DocumentCode
    2377002
  • Title

    Thin film metallization of three-dimensional substrates

  • Author

    Davis, J. Lynn ; Arledge, J. Kevin

  • Author_Institution
    Land Mobile Products Sect., Motorola Inc., Ft. Lauderdale, FL, USA
  • fYear
    1994
  • fDate
    1-4 May 1994
  • Firstpage
    359
  • Lastpage
    361
  • Abstract
    Metallization of three-dimensional (3D) molded polymer substrates by sputtering technology is an exciting alternative to traditional electroless plating processes. The technology offers the ability to rapidly coat the 3D circuit base without the use of precious metal catalysts or plating baths that may be environmentally harmful. Consequently, sputter coating of 3D circuits offers the advantages of high through-put and flexible manufacturing while minimizing disposable wastes. This paper focuses on the critical issues affecting the performance of sputtered thin film on 3D polymer substrates
  • Keywords
    adhesion; integrated circuit technology; metallisation; multichip modules; polymers; sputter deposition; sputtered coatings; substrates; 3D circuits; 3D molded polymer substrates; sputter coating; sputtered thin film; sputtering technology; thin film metallization; three-dimensional substrates; Adhesives; Circuits; Copper; Etching; Manufacturing; Metallization; Polymer films; Sputtering; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 1994. Proceedings., 44th
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-0914-6
  • Type

    conf

  • DOI
    10.1109/ECTC.1994.367564
  • Filename
    367564