Title :
Low power thermoelectric generator-self-sufficient energy supply for micro systems
Author :
Stordeur, Matthias ; Stark, Ingo
Author_Institution :
D.T.S. Gesellschaft zur Fertigung, Dunnschicht-Thermogenerator-Syst. mbH, Halle, Germany
Abstract :
New micro and sensor systems are being rapidly developed for their application in all technology events in future. The energy consumption of systems incorporated the latest technical advances decreases permanently to the range of only μW. For the applications in this low power range (a few 10 μW), DTS has developed a new self-sufficient power supply the low power thermoelectric generator. Whereas earlier with the help of MOS processing techniques manufactured thermoelectric generators reached only a μW-output, it was now possible to open up the μW-performance range on the basis of high effective thermoelectric compound semiconductor thin films, prepared by physical vapour deposition on polyimid substrates. The LPTG of DTS is a small compact thermoelectric device, full hybrid compatible with micro electronic and micro matched systems. Essential information about the LPTG device properties are given
Keywords :
integrated circuits; microsensors; power supplies to apparatus; semiconductor thin films; thermoelectric conversion; vapour deposited coatings; vapour deposition; energy consumption; low power thermoelectric generator; microelectronic systems; physical vapour deposition; polyimid substrates; self-sufficient energy supply; sensor systems; thermoelectric compound semiconductor thin films; Chemical vapor deposition; Energy consumption; Manufacturing processes; Power generation; Power supplies; Semiconductor device manufacture; Semiconductor thin films; Sensor systems; Substrates; Thermoelectricity;
Conference_Titel :
Thermoelectrics, 1997. Proceedings ICT '97. XVI International Conference on
Conference_Location :
Dresden
Print_ISBN :
0-7803-4057-4
DOI :
10.1109/ICT.1997.667595