DocumentCode
2377923
Title
Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
Author
Beyeler, F. ; Muntwyler, S. ; Nelson, B.J.
Author_Institution
ETH Zurich, Zurich, Switzerland
fYear
2009
fDate
12-17 May 2009
Firstpage
520
Lastpage
525
Abstract
This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This is the first microfabricated 6-axis force-torque sensor that has been successfully developed.
Keywords
calibration; force sensors; microfabrication; micromanipulators; torque control; MEMS; calibration; capacitive multiaxis force-torque sensor; microfabricated 6-axis force-torque sensor design; micromanipulation; microrobotic application; Atomic force microscopy; Biosensors; Calibration; Capacitive sensors; Capacitors; Force measurement; Force sensors; Magnetic sensors; Sensor phenomena and characterization; Torque;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 2009. ICRA '09. IEEE International Conference on
Conference_Location
Kobe
ISSN
1050-4729
Print_ISBN
978-1-4244-2788-8
Electronic_ISBN
1050-4729
Type
conf
DOI
10.1109/ROBOT.2009.5152253
Filename
5152253
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