Motorola MEMS switch technology for high frequency applications

Author

De Silva, A.P. ; Vaughan, C. ; Frear, D. ; Liu, L. ; Kuo, S.M. ; Foerstner, J. ; Drye, J. ; Abrokwah, J. ; Hughes, H. ; Amrine, C. ; Butler, C. ; Markgraf, S. ; Denton, H. ; Springer, S.

Author_Institution

Motorola Semicond. Product Sector, Tempe, AZ, USA

fYear

2001

fDate

2001

Firstpage

22

Lastpage

24

Abstract

Motorola Semiconductor Products Sector (SPS) has made significant progress in developing an integrated MEMS switch network for use in next-generation portable wireless systems. This MEMS switch technology has significantly better RF characteristics than conventional PIN diodes or FET switches and consumes less power. The RF MEMS switch exhibits insertion loss under 0.3 dB, isolation greater than 50 dB, and operating power under 200 μW. The RF MEMS switch chip is integrated with a high voltage charge pump plus control logic chips into a single package that provides a network system to accommodate low voltage requirements in portable wireless applications

Keywords

integrated circuit technology; micromechanical devices; microwave switches; mobile radio; radio equipment; semiconductor device packaging; semiconductor switches; FET switches; MEMS switch chip package; MEMS switch technology; Motorola MEMS switch technology; PIN diodes; RF MEMS switch chip; RF characteristics; control logic chips; high frequency applications; high voltage charge pump; insertion loss; integrated MEMS switch network; isolation; low voltage requirements; network system; operating power; portable wireless applications; portable wireless systems; power consumption; Charge pumps; FETs; Insertion loss; Isolation technology; Microswitches; Next generation networking; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectromechanical Systems Conference, 2001

Conference_Location

Berkeley, CA

Print_ISBN

0-7803-7224-7

Type

conf

DOI

10.1109/MEMSC.2001.992733

Filename

992733