DocumentCode
2378638
Title
Built-in self test of CMOS-MEMS accelerometers
Author
Deb, N. ; Blanton, R.D.
Author_Institution
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fYear
2002
fDate
2002
Firstpage
1075
Lastpage
1084
Abstract
A built-in self-test technique for MEMS that is applicable to symmetrical microstructures is described. A combination of existing layout features and additional circuitry is used to make measurements from symmetrically-located points. In addition to the normal sense output, self-test outputs are used to detect the presence of layout asymmetry that are caused by local, hard-to-detect defects. Simulation results for an accelerometer reveal that our self-test approach is able to distinguish misbehavior resulting from local defects and manufacturing process variations.
Keywords
MOSFET; accelerometers; built-in self test; micromechanical devices; semiconductor device testing; CMOS-MEMS accelerometers; accelerometer; built-in self test; hard-to-detect defects; layout asymmetry; layout features; manufacturing process variations; self-test outputs; symmetrical microstructures; symmetrically-located points; Accelerometers; Aerospace testing; Automatic testing; Built-in self-test; Etching; Integrated circuit technology; Manufacturing; Micromechanical devices; Silicon; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 2002. Proceedings. International
ISSN
1089-3539
Print_ISBN
0-7803-7542-4
Type
conf
DOI
10.1109/TEST.2002.1041864
Filename
1041864
Link To Document