Title :
Built-in self test of CMOS-MEMS accelerometers
Author :
Deb, N. ; Blanton, R.D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
A built-in self-test technique for MEMS that is applicable to symmetrical microstructures is described. A combination of existing layout features and additional circuitry is used to make measurements from symmetrically-located points. In addition to the normal sense output, self-test outputs are used to detect the presence of layout asymmetry that are caused by local, hard-to-detect defects. Simulation results for an accelerometer reveal that our self-test approach is able to distinguish misbehavior resulting from local defects and manufacturing process variations.
Keywords :
MOSFET; accelerometers; built-in self test; micromechanical devices; semiconductor device testing; CMOS-MEMS accelerometers; accelerometer; built-in self test; hard-to-detect defects; layout asymmetry; layout features; manufacturing process variations; self-test outputs; symmetrical microstructures; symmetrically-located points; Accelerometers; Aerospace testing; Automatic testing; Built-in self-test; Etching; Integrated circuit technology; Manufacturing; Micromechanical devices; Silicon; Temperature sensors;
Conference_Titel :
Test Conference, 2002. Proceedings. International
Print_ISBN :
0-7803-7542-4
DOI :
10.1109/TEST.2002.1041864
