High Q resonating cantilevers for in situ measurements of ferromagnetic films

Author

Moreland, John ; Hubbard, Ted J.

Author_Institution

Magnetic Technol. Div., Nat. Inst. of Stand. & Technol., Boulder, CO, USA

fYear

2001

fDate

2001

Firstpage

36

Lastpage

39

Abstract

We describe micro cantilevers developed for in-situ measurements of ultra-thin ferromagnetic films. The cantilevers are optimized for use in a resonating torque micro-balance magnetometer that measures the magnetic moment of thin films as they are being deposited on to the cantilever. Dynamic feedback is used to balance the magnetic torque by applying a mechanical force at the base of the cantilever that is equal and opposite to the magnetic torque. The dynamic feedback minimizes mass loading and temperature dependent elastic modulus effects that change the resonant frequency of the cantilever during deposition

Keywords

Q-factor; feedback; ferromagnetic materials; magnetic moments; magnetic thin films; magnetic variables measurement; micromechanical resonators; microsensors; torque; Fe-Si; Si; cantilever resonant frequency; dynamic feedback; high Q resonating cantilevers; in situ measurements; magnetic moment; magnetic torque balancing; mass loading effects; mechanical force; micro cantilevers; optimized cantilevers; resonating torque micro-balance magnetometer; temperature dependent elastic modulus effects; ultra-thin ferromagnetic films; Force feedback; Magnetic films; Magnetic moments; Magnetic resonance; Magnetoelasticity; Magnetometers; Q measurement; Sputtering; Temperature dependence; Torque measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectromechanical Systems Conference, 2001

Conference_Location

Berkeley, CA

Print_ISBN

0-7803-7224-7

Type

conf

DOI

10.1109/MEMSC.2001.992737

Filename

992737