Title :
A fast method for analysis and modeling of optical MEMS switches
Author :
Basha, M.A. ; Rohani, A. ; Safavi-Naeini, S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Abstract :
A fast and accurate method for modeling and analysis of optical MEMS switches is developed. The method is a combination of BPM, 3D-Gaussian beam tracing (GBT), physical optics, and electromagnetic reciprocity theory. The initial results show a great agreement between the simulated and measurement results for three different structures
Keywords :
coupled mode analysis; electromagnetic field theory; micro-optics; optical switches; physical optics; ray tracing; 3D-Gaussian beam tracing; BPM; electromagnetic reciprocity theory; modeling/analysis method; optical MEMS switches; physical optics; Beams; Dielectrics; Geometrical optics; Lenses; Microswitches; Mirrors; Optical crosstalk; Optical fiber polarization; Optical waveguides; Physical optics;
Conference_Titel :
Microelectromechanical Systems Conference, 2001
Conference_Location :
Berkeley, CA
Print_ISBN :
0-7803-7224-7
DOI :
10.1109/MEMSC.2001.992741
