Innovation pathways for microsystem technologies

Author

Boudreaux, J.C.

Author_Institution

Advanced Technology Program, Nat. Inst. of Stand. & Technol., MD, USA

fYear

2001

fDate

2001

Firstpage

58

Lastpage

61

Abstract

Microsystem (MST) or microelectromechanical system (MEMS) technology is an area of research and development which is focused on the miniaturization of systems which contain both electronic and nonelectronic components. There are substantial technical barriers to be overcome. From the perspective of the MST technologist the main technical barrier is to understand the engineering requirements of host systems, and, more narrowly, to understand them as defining technical constraints on acceptable microsystem applications. This paper is an attempt to define a framework for the discussion and analysis of these issues

Keywords

design engineering; micromachining; micromechanical devices; semiconductor device manufacture; MEMS technology; MST; acceptable microsystem applications; electronic components; engineering requirements; host systems; innovation pathways; microelectromechanical system technology; microsystem technology; miniaturization; nonelectronic components; technical barriers; technical constraints; Acceleration; Chemical technology; Mechanical systems; Micromechanical devices; Research and development; Signal processing; Systems engineering and theory; Technological innovation; Thermal force; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectromechanical Systems Conference, 2001

Conference_Location

Berkeley, CA

Print_ISBN

0-7803-7224-7

Type

conf

DOI

10.1109/MEMSC.2001.992742

Filename

992742