DocumentCode :
237883
Title :
Microwave substrate loss tangent extraction from coplanar Waveguide Measurements up to 125 GHz
Author :
Arz, Uwe
Author_Institution :
Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany
fYear :
2014
fDate :
6-6 June 2014
Firstpage :
1
Lastpage :
3
Abstract :
We present a semi-numerical method to extract the loss tangent of a low-loss microwave substrate material from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We demonstrate the method using test structures built on a SiO2 wafer for frequencies up to 125 GHz.
Keywords :
S-parameters; coplanar waveguides; dielectric loss measurement; dielectric materials; microwave materials; microwave measurement; numerical analysis; silicon compounds; SiO2; coplanar waveguide measurement; low-loss microwave dielectric substrate material; microwave substrate loss tangent extraction; on-wafer scattering-parameter measurement; seminumerical method; structure testing; Conductivity; Coplanar waveguides; Loss measurement; Microwave measurement; Permittivity; Permittivity measurement; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2014 83rd ARFTG
Conference_Location :
Tampa, FL
Type :
conf
DOI :
10.1109/ARFTG.2014.6899532
Filename :
6899532
Link To Document :
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