Title :
Microwave substrate loss tangent extraction from coplanar Waveguide Measurements up to 125 GHz
Author_Institution :
Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany
Abstract :
We present a semi-numerical method to extract the loss tangent of a low-loss microwave substrate material from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We demonstrate the method using test structures built on a SiO2 wafer for frequencies up to 125 GHz.
Keywords :
S-parameters; coplanar waveguides; dielectric loss measurement; dielectric materials; microwave materials; microwave measurement; numerical analysis; silicon compounds; SiO2; coplanar waveguide measurement; low-loss microwave dielectric substrate material; microwave substrate loss tangent extraction; on-wafer scattering-parameter measurement; seminumerical method; structure testing; Conductivity; Coplanar waveguides; Loss measurement; Microwave measurement; Permittivity; Permittivity measurement; Substrates;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2014 83rd ARFTG
Conference_Location :
Tampa, FL
DOI :
10.1109/ARFTG.2014.6899532
