DocumentCode
2380489
Title
Relaxed Germanium on Porous Silicon Substrates
Author
Wietler, Tobias F. ; Rugeramigabo, Eddy P. ; Bugiel, Eberhard ; Rojas, Enrique Garralaga
Author_Institution
Inst. of Electron. Mater. & Devices, Leibniz Univ. Hannover, Hannover, Germany
fYear
2012
fDate
4-6 June 2012
Firstpage
1
Lastpage
2
Abstract
In this paper, the authors study the surfactant-mediated epitaxy (SME) of relaxed Ge films on (001)-orientated porous silicon wafers, which could be a first step towards a cost-efficient lift-off technique for lightweight high-efficiency multijunction Ge/III-V solar cells. Transmission electron microscopy (TEM) and high-resolution X-ray diffraction (XRD) investigations show full relaxation and high structural perfection of the epitaxial Ge. An abrupt interface showing no evidence for intermixing is formed between Ge and Si. Similar to SME of Ge on standard Si(001) wafers the lattice mismatch is compensated by a periodic array of full edge dislocations parallel to the interface. XRD measurements indicate that part of the silicon is under a small tensile strain. The authors attribute this to partial strain accommodation in the top silicon layer of the porous substrate which acts as a compliant substrate.
Keywords
Ge-Si alloys; X-ray diffraction; dislocations; epitaxial growth; solar cells; stress relaxation; surfactants; transmission electron microscopes; Ge-Si; TEM; XRD; cost efficient lift-off technique; full edge dislocations; high resolution X-ray diffraction; lightweight high efficiency multijunction solar cell; porous wafer; surfactant-mediated epitaxy; transmission electron microscopy; Epitaxial growth; Germanium; Lattices; Photovoltaic cells; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon-Germanium Technology and Device Meeting (ISTDM), 2012 International
Conference_Location
Berkeley, CA
Print_ISBN
978-1-4577-1864-9
Electronic_ISBN
978-1-4577-1863-2
Type
conf
DOI
10.1109/ISTDM.2012.6222502
Filename
6222502
Link To Document