DocumentCode
2380637
Title
Improving the On-Resistance of FETs for Power Applications
Author
Isemann, H. ; Fischer, I. ; Hähnel, D. ; Oehme, M. ; Schulze, J.
Author_Institution
Inst. of Semicond. Eng., Univ. of Stuttgart, Stuttgart, Germany
fYear
2012
fDate
4-6 June 2012
Firstpage
1
Lastpage
2
Abstract
Low on-resistances (RON) has been applied to different power MOSFETs and IGBTs, universally to achieve low power consumption. The focus is on the optimization of two contributing factors to the RON of vertical power-MOSFET and IGBT-the resistance of the channel and of the substrate. The goal of applying these improvements to an IGBT structure have been performed and described.
Keywords
electric resistance; insulated gate bipolar transistors; power MOSFET; FET on-resistance; IGBT structure; Power Applications; channel resistance; power MOSFET; power consumption; Doping; FETs; Fabrication; Insulated gate bipolar transistors; P-i-n diodes; Resistance; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon-Germanium Technology and Device Meeting (ISTDM), 2012 International
Conference_Location
Berkeley, CA
Print_ISBN
978-1-4577-1864-9
Electronic_ISBN
978-1-4577-1863-2
Type
conf
DOI
10.1109/ISTDM.2012.6222516
Filename
6222516
Link To Document